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Electroplated hard magnetic material and its application in microelectromechanical systems

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6 Author(s)
Yufeng Su ; Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., China ; Hong Wang ; Guifu Ding ; Feng Cui
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We describe the preparation of CoNiMnP-based permanent-magnet material using several sulfate and chloride solutions. We studied eight samples, and all the samples show vertical magnetic anisotropy. Sample8, which was electroplated from a low-concentration chloride solution and under external magnetic field, demonstrates the best magnetic properties with coercivity 2632 Oe, remanence 0.20 T, and maximum magnetic energy 10.185 kJ/m3. An array structure can avoid the stress between the electroplated layer and the seed layer. The electroplated Co0.8Ni0.1174Mn0.0062P0.0762 permanent magnet has potential for bidirectional actuators in micro-electromechanical systems.

Published in:

IEEE Transactions on Magnetics  (Volume:41 ,  Issue: 12 )