Modeling and design of the novel MEMS phase shifter for Ka band applications

The paper presents a model which describes the stage circuit of a distributed MEMS transmission line (DMTL) phase shifter at Ka band and an approach for DMTL design utilizing the saw-shaped coplanar waveguide (SCPW). The results of circuit simulation and full wave analysis prove that the model is in good agreement with theoretical analysis. The model can effectively simplify the design complexity after optimization. Simulation results show that S/sub 11/ and S/sub 21/ can achieve -20 dB and -2.5 dB, respectively, at Ka band. Comparing with literature data, it has been predicted that S/sub 11/ improves about 8 dB.