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A 22-GHz push-push CMOS oscillator using micromachined inductors

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5 Author(s)
To-Po Wang ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Ren-Chieh Liu ; Hong-Yeh Chang ; Liang-Hung Lu
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This letter presents a low phase noise 0.35-μm CMOS push-push oscillator utilizing micromachined inductors. This oscillator results in an improvement in phase noise compared with the previously published Si-based voltage-controlled oscillators (VCOs) around 20GHz. With the high-Q inductors introduced by the micromachined structure, the oscillator achieves an oscillating frequency of 22.2GHz while exhibiting an output power of -7.5dBm with a phase noise of -110.1dBc/Hz at 1-MHz offset. This work also demonstrates the highest operating frequency among previously published Si-based VCOs using micromachined structures.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:15 ,  Issue: 12 )