Referenced Items are not available for this document.
We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz.
Published in:
Microwave and Wireless Components Letters, IEEE
(Volume:15
,
Issue:
12
)
Date of Publication: Dec. 2005
- Page(s):
- 856 - 858
- ISSN :
- 1531-1309
- INSPEC Accession Number:
- 8677216
- Digital Object Identifier :
- 10.1109/LMWC.2005.860006
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 05 December 2005
- Issue Date :
- Dec. 2005
- Sponsored by :
- IEEE Microwave Theory and Techniques Society
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