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RF inductors with suspended and copper coated thick crystalline silicon spirals for monolithic MEMS LC circuits

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8 Author(s)
Wengang Wu ; Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China ; Fengyi Huang ; Yi Li ; Shaoyong Zhang
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This letter presents a novel radio frequency (RF) inductor in a monolithic inductor-capacitor circuit developed by using micro-electromechanical systems (MEMS) fabrication technology. The inductor consists of 40-μm-thick single crystalline silicon spiral with copper surface coating as the conductor, which is suspended on a glass substrate. The fabricated inductor exhibits a self-resonance frequency higher than 15GHz, with the quality factor more than 35 and inductance over 5nH at 11.3GHz. Simulations based on a compact equivalent circuit model with parameters extracted using a characteristic-function approach have also been carried out for the inductor, and good agreement with measurements is obtained.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:15 ,  Issue: 12 )