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A high-Q multiple-ring resonator fabricated by standard 0.18-μm CMOS process is presented. This design achieves a high quality factor at W-band without the need of any post-processing steps. Simulation results indicate that the four open-loop rings enhance the quality factor by 120% compared with the resonator with a single ring. The measured quality factors are 38 and 83 at /spl sim/75GHz under the loaded and unloaded conditions, respectively.