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Gimbal-less MEMS two-axis optical scanner array with high fill-factor

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2 Author(s)
Jui-che Tsai ; Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taiwan ; Wu, M.C.

In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1×N2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. [1496].

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 6 )