MEMS-based biochip for the characterization of single red blood cell

We introduce a novel biosensor device for various biocell measurements by singular cell level with parallel analysis and high throughput. This paper deals with the details of its fabrication, including device packaging, and the practical measurement of red blood cells using a twin microcantilever type sensor array. Based on a simple measurement of the electrical impedance of a living single red blood cell and its suspension, an important set of data, which can be used to describe living matter, could be obtained.