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A lithographic process for integrated organic field-effect transistors

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3 Author(s)
Kymissis, I. ; Lab. for Org. Opt. & Electron., MIT, Cambridge, USA ; Akinwande, A.I. ; Bulovic, V.

This paper reports a photolithographic process for fabricating organic field-effect transistors which provides two layers of metal with arbitrary via placement, and optionally allows for subtractive lithographic patterning of the transistor active layer. The demonstrated pentacene transistors have a field-effect mobility of 0.1±0.05 cm2/(V·s). Parylene-C is used both as the gate dielectric and an encapsulation layer which allows for subtractive lithographic patterning. Also demonstrated is a PMOS inverter without level shifting circuitry and level-restoring VHigh and VLow. This work demonstrates a high definition, multilayer, integrated photolithographic process which creates organic field effect transistors suitable for use in integrated circuit applications such as a display backplanes.

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Display Technology, Journal of  (Volume:1 ,  Issue: 2 )