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Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

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5 Author(s)
Shih-Shou Lo ; Inst. of Opt. Sci., Nat. Central Univ., Jhong-Li, Taiwan ; Chiu, Hua-Kung ; Chen, Chii-Chang ; Shih-Chieh Hsu
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This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 12 )