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A fast switching electromagnetic microactuator with two stable positions is presented. The actuator of size 2.0×2.2 mm is fabricated using UV-LIGA technology. Test results show that a current pulse with an amplitude of 50 mA is needed for the actuator's switching between two stable states, and the switching time is approximately 20 μs. The displacement of the actuator is about 17 μm.
Date of Publication: 10 Nov. 2005