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Using insolubility wave-front for polymer deposition on self-assembling microfabricated parts

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3 Author(s)
Morris, Christopher J. ; Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA ; Ho, H. ; Parviz, B.A.

Many low temperature techniques exist for the deposition of polymer material. However, existing techniques require macroscopic substrates and are therefore inadequate for small, released microfabricated parts. We present a method for depositing material on microparts or substrates which utilizes a macroscopic solubility change to induce microscopic precipitation and selective deposition. Selectivity was achieved by modification of surface energy using self-assembled monolayers. We term this method insoluble liquid energy minimization, or ILEM. Macroscale substrates were used to characterize ILEM, and the method was applied to 20-100 μm-sized microfabricated parts which self-assembled into three-dimensional microstructures.

Published in:

MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

Date of Conference:

24-27 July 2005

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