Cart (Loading....) | Create Account
Close category search window

Stick-slip actuation of electrostatic stepper micropositioners for data storage-the μwalker

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
2 Author(s)
Patrascu, M. ; Control Eng. Lab., Twente Univ., Enschede, Netherlands ; Stramigioli, S.

This paper is about the μWalker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 μm. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the μWalker. Several methods to obtain displacements smaller than one nominal step (≈ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.

Published in:

MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

Date of Conference:

24-27 July 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.