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Infrared detection of carbon monoxide with a micromechanically tunable silicon fabry-perot filter

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4 Author(s)

Robust sensing of carbon monoxide is possible with a tunable correlation filter. We demonstrate a silicon Fabry-Perot filter with high optical throughput, where an adjustable hidden airgap allows for the necessary tuning

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005