By Topic

Vision-based teleoperation of a stroboscopic microscopic interferownetric system for remote dynamic MEMS testing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Garmire, D. ; Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA ; Muller, R.S. ; Demmel, J.

We demonstrate a system that automatically locates MEMS structures under a microscope equipped with a 3 DOF stage. It correlates images directly with the chip-mask layout and is especially useful for teleoperated experiments

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005