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Design, fabrication and characterization of a novel electrostatically actuated optical fiber switch

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3 Author(s)
Herding, M. ; Lab. for Design of Microsyst., IMTEK, Freiburg ; Wischke, M. ; Woias, P.

We will present the design, modeling, simulation, fabrication and characterization of a novel fiber optical switch that fulfils all requirements of optical measurement applications. The optical fiber switch presented here moves one incoming fiber with respect to two outgoing fibers. Our new approach moves fibers directly by electrostatic actuation within an "actuation chamber". A detailed modeling of the transient fiber movement under electrostatic load was done with FE methods

Published in:
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference: 1-4 Aug. 2005

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