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Honeycomb textured front surface of monocrystalline silicon and borosilicate glass substrates

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6 Author(s)
Manea, E. ; Dept. of Technol., Nat. Inst. for R&D in Microtechnol., Bucharest ; Budianu, E. ; Purica, M. ; Cernica, I.
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We present the results of an experimental study regarding the increase of the silicon solar cells efficiency by texturing the front surface and the fabrication of microcells on borosilicate glass substrate using silicon micromachining technologies. A `honeycomb' textured front surface has been obtained using a photolithography process to generate patterns (disc hole) on the top surface followed by isotropic etching

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005