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High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing

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8 Author(s)
Scholz, T. ; Inst. of Microstruct. Technol. & Anal., Kassel Univ. ; Depski, T. ; Romer, F. ; Irmer, S.
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We present an ultra-precise optical methodology to investigate complex nano- and microscale structures fabricated by micromachining. This method is applied for micromachined tunable multiple air-gap GaInAsP microresonators as well as for Si cantilever arrays which are fabricated commercially. These different devices are applied in scanning probe microscopy, analytics, sensing and high bit-rate communication. A detailed comparison of experimental studies with results of theoretical model calculations is performed on the basis of line-shape-fits to provide precise geometric and compositional parameters. We obtain an excellent agreement between experimental and theoretical data

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005