By Topic

High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Scholz, T. ; Inst. of Microstruct. Technol. & Anal., Kassel Univ. ; Depski, T. ; Romer, F. ; Irmer, S.
more authors

We present an ultra-precise optical methodology to investigate complex nano- and microscale structures fabricated by micromachining. This method is applied for micromachined tunable multiple air-gap GaInAsP microresonators as well as for Si cantilever arrays which are fabricated commercially. These different devices are applied in scanning probe microscopy, analytics, sensing and high bit-rate communication. A detailed comparison of experimental studies with results of theoretical model calculations is performed on the basis of line-shape-fits to provide precise geometric and compositional parameters. We obtain an excellent agreement between experimental and theoretical data

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005