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Electrostatic micro-shutter array for infrared spectrograph

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4 Author(s)
Takahashi, T. ; Inst. of Ind. Sci., Tokyo Univ. ; Mita, M. ; Fujita, H. ; Toshiyoshi, H.

We report an electrostatic micro shutter array for astronomical telescopes for parallel processing infrared spectroscopy of multiple celestial objects using bulk-micromachining of silicon-on-insulator wafers. Successful operation of micro torsion shutter to a 90-degree-deflection has been demonstrated with applied voltages of up to 95 V DC

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005