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Design and fabrication of MEMS optical modulators integrated with PHC waveguides

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6 Author(s)
A. Higo ; Inst. for Ind. Sci., Tokyo Univ. ; S. Iwamoto ; M. Ishida ; Y. Arakawa
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We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86 V with -27 dB insertion loss

Published in:

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.

Date of Conference:

1-4 Aug. 2005