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Roll-to-roll manufacturing technologies for flexible MEMS applications

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4 Author(s)
Kololuoma, T. ; VTT Electron., Optoelectron., Oulu ; Tuomikoski, M. ; Haring, T. ; Kopola, H.

Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005