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Free-space MEMS tunable optical filter on [110] silicon

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2 Author(s)

Tunable optical filters (TOFs) are key components in optical communication WDM networks. In this paper we have successfully demonstrated two-Bragg mirror Fabry-Perot MEMS tunable optical filter fabrication by a combination of KOH and deep reactive ion etching in (110) silicon

Published in:

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.

Date of Conference:

1-4 Aug. 2005