Referenced Items are not available for this document.
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch
Published in:
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Date of Conference: 1-4 Aug. 2005
- Page(s):
- 69 - 70
- Print ISBN:
- 0-7803-9278-7
- INSPEC Accession Number:
- 8634509
- Conference Location :
- Oulu
- Digital Object Identifier :
- 10.1109/OMEMS.2005.1540081
- Product Type:
- Conference Publications
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