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A physically based model for dielectric charging in an integrated optical mems wavelength selective switch

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2 Author(s)
Nielson, G.N. ; Sandia Nat. Labs., Albuquerque, NM ; Barbastathis, G.

A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005