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Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films

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4 Author(s)
Kotera, H. ; Micro Eng., Kyoto Univ. ; Kanno, I. ; Inoue, T. ; Suzuki, T.

In this paper we present the piezoelectric-driven deformable micro-mirror for optical wavefront correction. The mirror membrane was fabricated on diaphragm structure composed of piezoelectric PZT thin films on Si substrate. The application of voltage induced large deflection of the surface of the diaphragm

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005

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