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Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism

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6 Author(s)
Yoda, M. ; Seiko Epson Corp., Nagano ; Isamoto, K. ; Chong, C. ; Ito, H.
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We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005