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MOEMS laser tuning element with an indirect drive

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3 Author(s)
Syms, R.R.A. ; Dept. of Electr. & Electron. Eng., Imperial Coll., London ; Lohmann, A. ; Huang, W.

A tuning element for a Littrow external cavity laser combining a vertically etched blazed grating and linear and rotary tuning actuators is demonstrated. Extended tuning is achieved using an indirect drive via a flexure

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005