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A study of outgassing from spin-on-glass films used for planarization

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5 Author(s)
M. Kobayakawa ; Process Technol. Center, OKI Electr. Ind. Co. Ltd., Tokyo, Japan ; A. Arimatsu ; F. Yokoyama ; N. Hirashita
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The outgassing from phosphorus doped spin-on-glass (SOG) film was investigated by thermal desorption spectroscopy (TDS). Water and hydrocarbon were found to be main outgassing species from SOG films. Water desorption from SOG films is classified into three components and two hydrocarbon desorption peaks are also observed. The results reveal that water desorption are related to P-OH and Si-OH components in SOG films. It is necessary to optimize cure condition and phosphorus concentration in SOG films for highly reliable multi-level interconnects

Published in:

VLSI Multilevel Interconnection Conference, 1991, Proceedings., Eighth International IEEE

Date of Conference:

11-12 Jun 1991