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In this paper, the positioning of a piezo-driven xy table system via a fuzzy mixed H2/Hinfin optimization-based decentralized model reference control is developed. Each subsystem contained 6 linear pulse transfer function systems (LPTFSs). The reference model for every LPTFS was first designed to shape the response of the closed-loop of the ith subsystem. Then the H2 - norm of the output error and weighted control input of the jth LPTFS was minimized to obtain a control. The Hinfin - norm of weighted sensitivity between output disturbance and output error of the jth LPTFS was minimized to attenuate its effect. In addition, a nonlinear control based on output error for every LPTFS was also established to improve robust performance. The experiments of piezo-driven xy table system confirmed the usefulness of the proposed control.