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In the present work, the authors are focused on MEMS-based distributed systems, especially control methods applied to made it possible for a microactuator array to become an intelligent structure. Recently, couple control and distributed MEMS device is becoming an important topic in field of micro-and nanorobotic, as intelligent motion surface used in planar micromanipulation. Here, the authors propose to study a MEMS-based distributed micromanipulator using airflow force field that is still a challenging issue in the field. They chose architecture and implementation approach to define an appropriate distributed control system. Then, a control flow based on a hybrid centralized/decentralized approach is elaborated by applying principles of autonomous mobile robot, using CCD camera as feed-back distributed sensor. To implement the control model, a co-design software/hardware solution is chosen, with centralized controllers processing by PCU, and decentralized controllers integrated on a FPGA chip. VHDL models-based implementation results are given, just as experiment results by software emulation. Experimental results could show all presence of mind of the proposed control method.