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In this letter, we investigate the influence of tensile and compressive SiN layers on the device performance of triple-gate devices with 60-nm fin height and fin widths down to 35 nm. It will be shown that even for narrow fin devices, the nMOS performance improvement can be as high as 20% with tensile strained layers. The improvement seen for pMOS is lower, about 10%. Next to that both compressive as well as tensile SiN layers can increase the pMOS on-state current.
Date of Publication: Nov. 2005