By Topic

Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Jongbaeg Kim ; Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea ; D. Christensen ; L. Lin

We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° in the two orthogonal axes, respectively, under driving voltages of 20 Vdc plus 15 Vpp. A 90-day continuous mirror operation at peak resonance, in equivalent to 80 and 12.1 billion cycles on the two orthogonal axes, showed negligible performance variations.

Published in:

IEEE Photonics Technology Letters  (Volume:17 ,  Issue: 11 )