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An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz12/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 μm×5 μm and were separated by a distance of 5 μm. A combination of these Hall devices and a magnetization system incorporating both dc and ac bias magnetic fields, enabled the simultaneous detection of multiple 2.8 μm diameter superparamagnetic beads.
Date of Publication: Oct. 2005