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UV and ozone oxidation on GaAs form the oxide layer. Nitridation on oxidized GaAs creates the around 10 nm thin GaON insulating film which shows the comparatively good performance than only oxidized GaAs sample. Nitridation remove out the undesirable As-oxide from the oxi-nitride layer. Applying this insulator in the gate area, we fabricated n-channel, p-channel, depletion and enhancement mode GaAs MISFET. Transconductance obtained are 250 (n-channel depletion), 60 (n-channel enhancement), 25 (p-channel enhancement) mS/mm, respectively which are larger than the previously reported data.