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Fabrication and measurements using ultra-tall near-field coaxial tips

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4 Author(s)
Wang, Yaqiang ; Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA ; Paulson, C.A. ; Guoqing Ning ; Van Der Weide, D.W.

We present a new method for microfabrication of coaxial silicon tips with heights >50 μm. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005

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