Cart (Loading....) | Create Account
Close category search window
 

Modeling of the dielectric charging kinetic for capacitive RF-MEMS

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

10 Author(s)
Melle, S. ; LAAS-CNRS, Toulouse, France ; De Conto, D. ; Mazenq L ; Dubuc, D.
more authors

This paper reports on the investigation of the kinetic of the dielectric charging in capacitive RF-MEMS through an original method of stress and monitoring. This effect has been investigated through a new parameter that is the shift rate of the actuation voltages (SRAV). We demonstrate that this lifetime parameter has to be considered as a function of the applied voltage normalized by a factor which takes the contact quality between the bridge and the dielectric into account. We also demonstrate that this phenomenon is related to Frenkel-Poole conduction which takes place into the dielectric. We finally propose a model which describes the dielectric charging kinetic in capacitive RF MEMS.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.