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Characterization of thin film BST tunable capacitors using a simple two port measurement technique

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5 Author(s)
Xinen Zhu ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Ding-Yuan Chen ; Zhang Jin ; Phillips, J.D.
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A simple two-port measurement technique was developed based on equivalent lumped element circuit model of capacitor using thin film barium strontium titanate (BST) material. This technique allows one to determine the loss contribution due to dielectric BST and conductor separately. The loss tangent of BST obtained is about 0.012 up to 10 GHz for a 0.24 pF capacitor. 2.4:1 tunability was achieved at the bias voltage of 15 V.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005

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