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Ferromagnetic RF integrated inductor with closed magnetic circuit structure

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6 Author(s)
Yamaguchi, M. ; Dept. of Electr. & Commun. Eng., Tohoku Univ., Japan ; Seok Bae ; Ki Hyeon Kim ; Tan, K.
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Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductors are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated inductor at 1 GHz.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005