By Topic

Laterally moving bistable MEMS DC switch for biomedical applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Receveur, R.A.M. ; Medtronic Bakken Res. Center, Maastricht, Netherlands ; Marxer, C.R. ; Woering, R. ; Larik, V.C.M.H.
more authors

In this paper, we have designed a bistable microelectromechanical switch for an implantable lead electrode multiplexer application. Fabrication is based on a single mask process. State changes require an 18 V pulse to the actuators consuming only 0.2 nJ energy. The switch does not consume any energy in either the ON or the OFF state. Total chip size including bond pads is approximately 1.5 mm × 1.5 mm. The initial contact resistance is below 5 Ω with a contact force in the order of 10 μN. The contact resistance stays consistently below 30 Ω for the first 40 000 cycles. Breakdown voltage between the two contact members in OFF state is 300 V. We plan to further investigate applicability of this switch in the biomedical field.

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 5 )