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Semiconductor production schedule check and correction technique through mobile agent system

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3 Author(s)
Fujinaga, Kiyohisa ; Hokkaido Inst. of Technol., Sapporo ; Takazawa, G. ; Sato, G.

A novel agent system that can check and correct machine schedules in semiconductor production was proposed The system consists of stationary machine agents that control their machine schedules, mobile agents that move between the machines, machine schedule files described in XML, and a time buffer stage where lots wait to keep the machine schedules. The real-time scheduling system proceeds according to the rules of mobile agent generation, machine scheduling, and machine and mobile agents collaboration. The system was confirmed through the computer simulation, supposing a small-scaled semiconductor production line

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005