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Design of automated experiment management system with applications to R&D and large volume semiconductor manufacturing

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4 Author(s)
Kyoung Shik Jun ; Applied Mater. Inc., Santa Clara, CA ; Ellenberg, S. ; Carlier, A. ; Yong Ho Lee

This paper will explain the design methodology of automated experiment management systems applicable to both semiconductor R&D and manufacturing processes. The latest advanced R&D and high volume manufacturing sites require more flexibility modifying experimental processes with wafers. This is due to integrated and specific process design test needs without increasing cycle time and cost. The automated experiment management design method will be demonstrated by using a manufacturing execution system (MES), called Applied FAB300reg

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005