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Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

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3 Author(s)
Christopher, J. ; Rochester Inst. of Technol., NY ; Kuhl, M.E. ; Hirschman, K.

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control policies to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005