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New job classes for fully automated reticle and sorter dispatch

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1 Author(s)
Tamehiro, R. ; IBM Japan Ind. Solution Co. Ltd., Tokyo

The function to support automated lot dispatch, transport, performing process and data collection for fully automated fab operation has been enhanced following new 300 mm standards and requirements in Manufacturing Execution System (MES) along with relative components. However, fully automated reticle dispatch and dispatching FOUP to wafer sorter has not been implemented well. This paper introduces new job classes to support automated reticle dispatch and sorter dispatch

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005