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Study for Realizing Effective Direct Tool-to-Tool Delivery

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2 Author(s)
H. Kondo ; Asyst Shinko Inc., Mie ; M. Harada

Direct tool-to-tool delivery is one of technical topics for excellent fab performance. Automatic material handling system (AMHS) vendors supply unified OHT systems that can provide direct tool-to-tool delivery routes. But providing such routes is not sufficient to realize direct deliveries. The purpose of our study is to identify remaining issues required to realize direct tool-to-tool delivery. Our conclusions are: (1) AMHS cannot realize direct tool-to-tool delivery by itself without any degradation of fab throughput, and (2) effective algorithms for lot scheduling/dispatching and variability reduction of tool process rate are required to realize it without such degradation

Published in:

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005.

Date of Conference:

13-15 Sept. 2005