Virtual fab technology utility simulation and its application to 300mm CR facility design and energy reduction

A new concept for facility design and electric power/energy analysis is introduced We developed the virtual fab simulator comprising of the lot flow simulator and the utility simulator called as FRS, fab resource simulator. With this simulator, we can estimate more accurate utility, and evaluate the reduction items. N2 facility size, for example, can be reduced by over 50% compared with the conventional method. The simulator also can be applied to analyzing the electric power consumptions of tools and reveals that the idle state power occupies approximately 1/3 of the total tool consumptions. Thus the virtual fab simulator is quite useful for efficient facility design and its analysis