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2005 IEEE International Symposium on Semiconductor Manufacturing

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The following topics were dealt with: environment; safety; health; factory design; automated material handling; manufacturing control; manufacturing management; process control; process monitoring; robust engineering; process equipment; metrology equipment; process optimization; material optimization; contamination control; ultraclean technology; and yield enhancement methodology

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005