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Temperature variation of actuation voltage in capacitive MEMS switches

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2 Author(s)
Goldsmith, C.L. ; MEMtronics Corp., Plano, TX, USA ; Forehand, D.I.

A simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive radio frequency microelectromechanical systems switches. Measured data from these switches fit very well with the model over a 120°C operating temperature range, demonstrating an average 0.127V/°C to 0.132V/°C with less than 8% deviation between measured and modeled results. The proposed model provides valuable insight into the factors impacting variability of actuation voltage over broad temperature ranges.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:15 ,  Issue: 10 )