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Hybrid ring coupler for W-band MMIC applications using MEMS technology

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7 Author(s)
Sung-Chan Kim ; Millimeter-wave INnovation Technol. Res. Center, Dongguk Univ., Seoul, South Korea ; Baek-Seok Ko ; Tae-Jon Baek ; Byeong-Ok Lim
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The hybrid ring coupler was designed and fabricated on a GaAs substrate using surface micromachining techniques, which adopted dielectric-supported air-gapped microstrip line (DAML) structure. The fabrication process of DAML is compatible with the standard monolithic microwave integrated circuit (MMIC) techniques, and the hybrid ring coupler can be simply integrated into a plane-structural MMIC. The fabricated hybrid ring coupler shows wideband characteristics of the coupling loss of 3.57 ± 0.22dB and the transmission loss of 3.80 ± 0.08dB across the measured frequency range of 85 to 105GHz. The isolation characteristics and output phase differences are -34dB and 180±1°, at 94GHz, respectively.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:15 ,  Issue: 10 )