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Micromachined inverted F antenna for integration on low resistivity silicon substrates

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6 Author(s)
Ojefors, E. ; Dept. of Eng. Sci., Uppsala Univ., Sweden ; Grenier, K. ; Mazenq, L. ; Bouchriha, F.
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This letter addresses the integration of a 24-GHz inverted-F antenna on a low resistivity silicon substrate, using micromachining post-processing techniques compatible with commercial Si/SiGe active device processes. By suspending the radiator on a 2.4mm2 large polymer membrane an on-chip antenna with -0.7 dBi gain has been realized.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:15 ,  Issue: 10 )