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A diffraction-based optical method for the detection of in-plane motion of Lamb waves

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2 Author(s)
Che-Hua Yang ; Dept. of Mech. Eng., Chang Gung Univ., Taoyuan, Taiwan ; Yua-Ching Tsai

This paper describes a laser optical technique that allows the detection of in-plane motion of Lamb waves. This interference-based laser optical technique includes a tiny square indentation with a width of about 30 /spl mu/ on the sample surface and a relatively simple optical arrangement. The current technique is applied for the detection of in-plane motions of Lamb waves propagating in a 70-/spl mu/. thick brass plate. Measurement of S/sub 0/ mode dominated by in-plane motion in the low fd (frequency times thickness) regime is successfully demonstrated with the current technique. With the indentation replaced by a microreflector in a microelectromechanical (MEMS) structure, this technique is applicable for the detection of in-plane motion in MEMS structures.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:52 ,  Issue: 8 )